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晶体加工 Silicon Processing
硅晶体加工技术
峨半公司从事单晶硅的科研 、生产已有四十多年的历史 。有大批专业技术人员和高水平的拉晶技术工人 。经多年的发展，单晶硅的生产能力已不断扩大。目前拥有世界先进水平的FZ-30炉、CG6000、TDR85A-ZJS、ZJS-95等硅单晶制造设备，直拉单晶的现有产能650吨/年，其中太阳能级产品600吨/年、IC级单晶15吨/年 、晶体管级产品5吨/年 ，区熔单晶现有产能30吨/年， 最大直径Ф5"。我们也是国家唯一能提供真空区熔超高阻单晶硅的企业 ，电阻率可达10000 Ω.c m以上，产品广泛运用于特种器件的生产之中。
硅片加工已有二十多年的历史, 其中N〈100〉、P〈111〉IC级抛光片曾获得国家银质奖。公司拥有一批世界先进水平的高精加工设备如DS265，DS264多线切割机、TS-207内圆切割机、 倒角机 、研磨机 、抛光机等 ，目前已有产能为硅抛光30万片/年、硅化腐片60万片/年、硅磨片280万片 /年 ，最大加工直径达Ф6"、最薄200微米研磨片等，能够为集成电路制造业、分立器件制造业提供高质量的单晶硅片 。同时 ，光伏园区一期60MW项目已经投产，具有太阳能电池单晶硅片生产能力达3600万片/年。
Silicon Processing Technology
Our company has been especalized in monocrystalline’s sientific research and production for 40 years.There are a large number of professional and technical personnel and skilled crystal-pulling workers.With many years’ development,the capacity of monocrystalline silicon has expanded.Now, our company has the world’s advanced monocrystalline silicon manufacturing equipments, such as FZ-30 furnance,CG6000,TDR85A-ZJS, and ZJS- 95. The annual production capacity of monocrystalline silicon is 650 tons.Among them,the solar-level is 600 tons, circuit-level is 15 tons ,transistor-level is 5 tons. The capacity of zone-melting monocrystalline silicon is about 30 tons per year, and its maximum diameter isφ5″. The company is the only one enterprise that can provide ultra-high resistance vacuum zone melting silicon in China. Its products are widely used for the production of special electronic components and devices.
Wafer processing has more than 20 years’history, in which N<100>and P<111>I C-grade polished wafer were awarded the National Silver Medal. The company has a series of world- level high-finishing equipments, such as DS265, DS264 Multi Wire,TS- 207 inner circular cutting machine ,chamfering machine,grinding machine ,polishing machine,etc.Sofar,the annual silicon processing capacity is 300,000 polished wafers, 600,000 corroded wafers,and 2.8million ground wafers. Their maximum diameter is up to φ6″,the minimum thickness of ground wafer sis 200μm. It can provide high- quality wafers for the integrated circuit manufacturing industry and discrete devices manufacturing industry.The Phase I ,60MW project of PV Park has put into operation,and it has an annual capacity of 36 million solar cell wafers. |
